| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a proximity effect correction method for decreasing the number of times of proximity effect correction which induces defects in judging the accuracy of proximity effect correction and thereby, for decreasing works in conventional defect judgment inspection. <P>SOLUTION: On proximity effect correction, a proximity effect correction pattern X1, a proximity effect correction pattern X1', and a proximity effect correction pattern X1" are added to a circuit pattern. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
