| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide stainless coated with a silica-based inorganic polymer film with a surface recessed and projected structure capable of producing a back surface reflection layer with recessed and projected parts for attaining the optical path length of a thin film solar battery, and its manufacturing method. <P>SOLUTION: Stainless foil is coated with the silica-based inorganic polymer film mainly consisting of siloxane bonds, and at least a part of Si constituting the silica-based inorganic polymer film is chemically bonded with one or both of an organic radical and hydrogen. The stainless foil coated with the silica-based inorganic polymer film having a recessed and projected structure on the surface of the silica-based inorganic polymer film and its manufacturing method are provided. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
