发明名称 |
Reactor cleaning apparatus |
摘要 |
<p>In a reactor cleaning apparatus 1 which cleans an inner wall surface 72 of a reactor 70 which generates polycrystalline silicon, a bell jar of the reactor 70 has a dual structure, a through hole 11 is formed along a vertical direction at a central portion of a substantially dise-like tray 10 placed in a horizontal state, a flange portion 13 in which an opening edge of the reactor 70 is placed is formed at an outer peripheral portion of the tray 10, a shaft 20 is provided through the through hole 11 of the tray 10 so as to be rotatable and movable in the vertical direction, a nozzle device 50 which sprays a cleaning water at high pressure in three-dimensional directions is provided at an upper end of the shaft 20, a drive mechanism 30 which rotates the shaft 20 and moves the shaft in the vertical direction is provided at a base end of the shaft 20 , and steam piping 62 capable of supplying the steam within the bell jar of the reactor 70 is provided.</p> |
申请公布号 |
EP2082814(B1) |
申请公布日期 |
2011.04.27 |
申请号 |
EP20090151031 |
申请日期 |
2009.01.21 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
ENDOH, TOSHIHIDE;TEBAKARI, MASAYUKI;ISHII, TOSHIYUKI;SAKAGUCHI, MASAAKI |
分类号 |
B08B3/02;F27D25/00;B08B3/04;B08B3/08;B08B9/28;B08B9/34;C01B33/02;C01B33/035;C23C16/44 |
主分类号 |
B08B3/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|