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发明名称
APPARATUS FOR THIN-LAYER CHEMICAL PROCESSING OF SEMICONDUCTOR WAFERS
摘要
申请公布号
EP1639629(B1)
申请公布日期
2011.04.27
申请号
EP20040754948
申请日期
2004.06.10
申请人
WEN, SOPHIA
发明人
WEN, SOPHIA
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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