GROUP III NITRIDE CRYSTAL, METHOD OF ITS MANUFACTURE, AND EQUIPMENT FOR MANUFACTURING GROUP III NITRIDE CRYSTAL

摘要

PURPOSE: A III group nitride crystal, a manufacturing method thereof, and a manufacturing apparatus thereof are provided to improve the growth of the III group nitride crystal on a seed crystal by removing a surface oxide layer of melt solutions. CONSTITUTION: A melt solution including a III group element and a catalyst is formed around a seed crystal in a reaction container(21). The reaction container is installed in an external container(22) and receives the melt solution including the catalyst and the III group element around the seed crystal. A III group nitrogen crystal is grown on the seed crystal by supplying nitrogen containing material to the melt solution. A heater and an insulation member are made of graphite in the external container.