| 摘要 |
PURPOSE: An antenna structure and plasma generating apparatus are provided to eliminate polymers generated in a charged electrode using a charged electrode branched from antenna structures. CONSTITUTION: A plasma generating apparatus comprises a first antenna structure(50a), a second antenna structure(50b), a reactance device unit(36a,36b), and a power supply unit(32). The reactance device unit is serially connected to the first antenna structure and the second antenna structure. The power supply unit is connected with the first antenna structure and the second antenna structure in parallel. First charged electrodes form plasma and an electric condenser. |
