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发明名称
SHOWERHEAD, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SHOWERHEAD, AND PLASMA SUPPLYING METHOD USING THE SHOWERHEAD
摘要
申请公布号
EP2195827(A4)
申请公布日期
2011.04.27
申请号
EP20080793683
申请日期
2008.09.04
申请人
EUGENE TECHNOLOGY CO., LTD.
发明人
YOON, SONG-KEUN;SONG, BYOUNG-GYU;LEE, JAE-HO;KIM, KYONG-HUN
分类号
H01L21/205;C23C16/455;H01J37/32
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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