| 摘要 |
PURPOSE: A temperature sensor embedded driven ceramic heater is provided to remarkably improving the temperature sensing speed and the heat transfer rate of the heater by concentrating the heat transfer to a heat radiation plate. CONSTITUTION: A temperature sensor embedded driven ceramic heater comprises the following: a first sheet(130) including a temperature sensor pattern and a temperature sensor contacting electrode on the upper side; a second sheet(120) including a heat radiation pattern, a heat radiation contacting electrode on the upper side, and a first inlet hole for inserting a first lead line(140a) to the temperature sensor contacting electrode; and a third sheet laminated on the second sheet, including a second inlet hole for inserting the first lead line and a second lead line(140b) into the heat radiation contacting electrode. |
