| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic sucking method of overlapping two or more objects to be sucked and sucking them to an electrostatic sucking device in the overlapped state, and the electrostatic sucking method of sucking the object to be sucked on the side of the electrostatic sucking device of the objects to be sucked while the other objects to be sucked are detached. SOLUTION: A voltage is applied to a first electrode 34 and a second electrode 35 of an electrostatic sucking device 10 and a first object to be sucked 41 is overlapped with a second object to be sucked 42 to electrostatically suck it to the electrostatic sucking device 10 in the overlapped state. Thereafter, by increasing a potential difference between the first electrode 34 and the second electrode 35, the first object to be sucked 41 is sucked to the side of the electrostatic sucking device 10, while the second object to be sucked 42 is detached from the electrostatic sucking device 10. COPYRIGHT: (C)2008,JPO&INPIT |
