LENS BARREL SUPPORTING DEVICE AND MASKLESS EXPOSURE APPARATUS HAVING THE SAME
摘要
PURPOSE: A lens barrel supporting apparatus and a maskless exposing apparatus including the same are provided to adjust the position and the angle of a lens barrel using the lens barrel supporting apparatus. CONSTITUTION: A lens barrel supporting apparatus(20) supports a lens barrel guiding light to a substrate. The lens barrel is supported to be capable of rotating based on the first axis of the lens barrel. The lens barrel is tiltably supported based on the second axis and the third axis of the lens barrel. The second axis and the third axis are orthogonal to the first axis of the lens barrel. The lens barrel supporting apparatus includes a guide frame(210), a rotary guide(220), and a tilting frame.
申请公布号
KR20110043035(A)
申请公布日期
2011.04.27
申请号
KR20090099958
申请日期
2009.10.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, SANG HYUN;HONG, SANG JOON;JANG, SANG DON;KIM, OUI SERG;BAEK, DONG SEOK