| 摘要 |
PURPOSE: A screw rotor type vacuum pump with a built-in motor is provided to minimize the breakage of rotation balance of screw rotors because the motor is installed inside one of the pair of screw rotors. CONSTITUTION: A screw rotor type vacuum pump comprises a pair of screw rotors(25,26), a housing(27), and a motor(4). The screw rotors rotate by gearing with each other. The housing with an inlet(21) and an outlet(22) on both sides thereof accommodates the pair of screw rotors. The motor is installed inside one of the pair of screw rotors and drives the rotary shaft of the screw rotor in which a centrifugal pump(1) is installed.
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