AL ALLOY MEMBER, ELECTRONIC DEVICE MANUFACTURING DEVICE, AND MANUFACTURING METHOD FOR AL ALLOY MEMBER WITH ANODIC OXIDE FILM

摘要

Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that , in mass%, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01 % or less, and the Vickers hardness of the Al alloy member is greater than 30.