| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle liner or a device capable of surely peeling a pellicle, a peeling method, and a method for manufacturing a pattern substrate. Ž<P>SOLUTION: The device for peeling a pellicle liner in one aspect is the device for peeling a pellicle liner 33 from a pellicle frame 32 by fixing a tab 34, protruding outside the pellicle frame 32 in the neighborhood of the center of the side of the pellicle frame 32 to a case 31, when taking out a pellicle 30 from the case 31, having the pellicle frame 32 on which the pellicle liner 33 for protecting an adhesive layer 38 is provided. The device comprises a pellicle retainer 23 for retaining the pellicle 30, a distortion gauge 24 for detecting the load on the pellicle retainer 23, and a driving motor 13 for driving the case 31 for spacing the pellicle retainer 23 and the case 31. Ž<P>COPYRIGHT: (C)2007,JPO&INPIT Ž</p> |
