发明名称 |
Laser patterning of devices |
摘要 |
<p>A technique for forming on a substrate an electrical device including at least one patterned layer, the technique comprising selectively exposing material on the substrate to a beam of light so as to modify the physical properties of a first layer and bring about patterning of the first layer.</p> |
申请公布号 |
EP2315289(A2) |
申请公布日期 |
2011.04.27 |
申请号 |
EP20100182731 |
申请日期 |
2002.05.22 |
申请人 |
PLASTIC LOGIC LIMITED |
发明人 |
SIRRINGHAUS, HENNING;CAIN, PAUL ALAN |
分类号 |
G03F7/004;H01L51/40;B41M5/00;G03F7/00;G03F7/038;G03F7/039;G03F7/20;G03F9/00;H01L21/027;H01L21/3205;H01L21/336;H01L21/768;H01L29/786;H01L51/00;H01L51/05;H01L51/30 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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