发明名称 Laser patterning of devices
摘要 <p>A technique for forming on a substrate an electrical device including at least one patterned layer, the technique comprising selectively exposing material on the substrate to a beam of light so as to modify the physical properties of a first layer and bring about patterning of the first layer.</p>
申请公布号 EP2315289(A2) 申请公布日期 2011.04.27
申请号 EP20100182731 申请日期 2002.05.22
申请人 PLASTIC LOGIC LIMITED 发明人 SIRRINGHAUS, HENNING;CAIN, PAUL ALAN
分类号 G03F7/004;H01L51/40;B41M5/00;G03F7/00;G03F7/038;G03F7/039;G03F7/20;G03F9/00;H01L21/027;H01L21/3205;H01L21/336;H01L21/768;H01L29/786;H01L51/00;H01L51/05;H01L51/30 主分类号 G03F7/004
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