发明名称 Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus
摘要 A displacement detection apparatus includes a light source for emitting light and an extinction ratio conversion element which raises an extinction ratio of the light to 20 dB or more. A condenser lens condenses the light having the increased extinction ratio and a polarization maintaining type optical fiber transmits the condensed light which is subsequently transferred to a diffraction grating that is attached to an object to be measured. The displacement detection apparatus adjusts a polarization axis of the light having increased extinction ratio.
申请公布号 US7933023(B2) 申请公布日期 2011.04.26
申请号 US20060438114 申请日期 2006.05.19
申请人 MORI SEIKI, CO., LTD. 发明人 TAMIYA HIDEAKI
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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