FILM BULK ACOUSTIC RESONATOR AND METHOD OF MANUFACTURE

摘要

PURPOSE: A film bulk acoustic resonator and manufacturing method thereof are provided to more associate an additional manufacturing process for improving the frequency feature of an FBAR device with an existing process, thereby improving the frequency feature of the FBAR device. CONSTITUTION: A protruded part(112) is located in a cavity(111). The protruded part changes a resonance frequency by controlling the acoustic impedance of a piezoelectric layer(108). The cavity is surrounded by a frame pattern(106) and a first electrode(107) on a substrate(101). The frame pattern is formed on the edge of the cavity. The frame pattern formed on the cavity adjusts the acoustic impedance of the piezoelectric layer located in the protruded part. A first electrode is formed on the cavity. The first electrode has a protruded part by a frame pattern on the cavity.