| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a transparent electrode, including a tin oxide film capable of being easily patterned and realized at low cost and having a low resistance and excelling transparency. SOLUTION: The method of manufacturing the transparent electrode on the substrate of which the patterned tin oxide film is formed includes a step of forming a SnO<SB>2</SB>-x film (0.3≤x≤1.95) on a substrate; a step of removing a part of the SnO<SB>2</SB>-x film and patterning it; and a step of turning the patterned SnO<SB>2</SB>-x film into the tin oxide film, by heat treatment, or the method includes a step for forming a tin oxide film whose film density is 6.5 g/cm<SP>3</SP>or less on the substrate; a step of removing a part of the tin oxide film whose film density is 6.5 g/cm<SP>3</SP>or less and patterning it; and a step of turning the patterned tin oxide film whose film density is 6.5 g/cm<SP>3</SP>or less into a tin oxide film by heat treatment. COPYRIGHT: (C)2011,JPO&INPIT
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