| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a display, including a device for overlapping a pair of substrates parallel to each other at a prescribed gap in a prescribed positional relation, in which an accuracy of gap formation and uniform alignment is improved, the cost of the apparatus is reduced by simplified structure of the apparatus, a productivity is improved, and air bubbles and the mixing of dust are reduced. SOLUTION: After a pair of substrate holding tools constituting a vacuum container, hold a pair of substrates, and the container is closed by an opening and closing mechanism, the inside of the container is evacuated by an evacuation system and the gap formation and alignment of the substrates are performed in a vacuum. Then, a difference pressure applying mechanism pressurizes the substrate by introducing gas into a close space to be formed with a diaphragm existing at the back of the substrate of one side and also a pressurizing mechanism mechanically pressurizes the substrate, and then the gap formation is performed. Gap lengths and the parallelism of the pair of the substrates are measured by a plurality of distance sensors, and a gap forming operation is feedback-controlled. COPYRIGHT: (C)2011,JPO&INPIT
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