| 摘要 |
PROBLEM TO BE SOLVED: To measure highly accurately a three-dimensional shape of a micromachine or the like having a rectangular groove shape by using a contact body of particles. SOLUTION: The contact body 6 is connected to a probe body 9 by a flexible support member 5 and a transparent fixing member 4. Laser light G is condensed by an objective lens 3, and a bottom surface of the contact body 6 is focused, and the contact body 6 is brought into contact with the surface of a measuring object 13. The laser light G is deflected by an acoustooptical deflector 2, to thereby vibrate the contact body 6 in an optional direction. Even when the measuring object 13 is a three-dimensional structure having a rectangular groove shape, highly accurate shape measurement can be performed by adjusting the vibration direction of the contact body 6. COPYRIGHT: (C)2011,JPO&INPIT
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