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发明名称
Halbleitervorrichtung und Verfahren zu ihrer Herstellung
摘要
申请公布号
DE102010042383(A1)
申请公布日期
2011.04.21
申请号
DE20101042383
申请日期
2010.10.13
申请人
MITSUBISHI ELECTRIC CORP.
发明人
NARAZAKI, ATSUSHI
分类号
H01L21/822
主分类号
H01L21/822
代理机构
代理人
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