| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating apparatus which is capable of suppressing the deterioration of membrane properties of a coating film including a metal that is easily oxidized, and to provide a coating method. <P>SOLUTION: The coating apparatus is provided with an application part which applies a liquid body including the metal that is easily oxidized on a substrate, a chamber which surrounds an application space for the liquid body to be applied by the application part and a transferring space after the application of the substrate that the liquid body has been applied, and an adjustment part which adjusts at least one of the oxygen concentration and humidity within the chamber. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
