| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer for suppressing persistence of a liquid raw material within the vaporizer when stopping generating a source gas and for facilitating cleaning the inside of a liquid raw material supply path. SOLUTION: The vaporizers 229s, 229b, 229t include: vaporizing chambers 51s, 51b, 51t for vaporizing the liquid raw material; heaters 61s, 61b, 61t for heating the inside of the vaporizing chambers; atomizing nozzles 31s, 31b, 31t for atomizing the liquid raw material into the vaporizing chambers; and a valve for controlling supply of a carrier gas, the liquid raw materials, and solvents into the atomizing nozzles. The valve is directly connected to the atomizing nozzles 31s, 31b, 31t. COPYRIGHT: (C)2011,JPO&INPIT
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