| 摘要 |
PROBLEM TO BE SOLVED: To prevent a gap from being generated between the peripheral edge part of a lid and a tray in a case for storing a pellicle. SOLUTION: The case 1 has a closed structure A for closing a space between the peripheral edge part 10 of the lid 4 and the tray 3 under a condition that the lid 4 covering the tray 3 is bent by its own weight. The closed structure A has an inclined part 3b to which the undersurface 10a of the peripheral edge part 10 of the lid 4 tightly attaches on the upper face of the tray 3 under a condition that the undersurface 10a of the peripheral edge part 10 of the lid 4 is inclined to the horizontal upper face of the tray 3 by the lid 4 bent by its own weight. COPYRIGHT: (C)2011,JPO&INPIT |
