| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To make an operating space of a substrate transport arm as small as possible so as to minimize a size of a machining device. <P>SOLUTION: The substrate machining device 10 consists: a frame 16; a drive section 42; an articulated arm 44; and at least a pair of end effectors. The drive section 42 is connected to the frame 16. The articulated arm 44 is connected to the drive section 42. The articulated arm 44 has a shoulder and a wrist. The arm 44 is pivotally mounted on the drive section 42 at the shoulder. The pair of end effectors is connected to the articulated arm 44. The pair of end effectors is pivotally jointed to the wrist of articulated arms 44 to rotate about a common axis of rotation at the wrist relative to the articulated arm 44. Each end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm 44. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
