| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating method and a coating apparatus which suppress a deterioration in the quality of a coated film containing an easily oxidative metal. <P>SOLUTION: A coating method includes a coating step of laminating a plurality of liquid body layers on a substrate by coating the substrate with the liquid body containing the easily oxidative metal plural times, and a controlling step, by the coating step, of controlling at least one of oxygen concentration and humidity in the chamber enclosing the space coated with the liquid body and the moving space of the substrate coated with the liquid body by the coating step. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
