| 摘要 |
The present invention relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of a pixel of a digital micro-mirror display (DMD) formed by a first image-forming lens in the maskless exposure apparatus has no influence on the image of a neighboring pixel and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures (NAs) at the same time. The optical component is configured such that a micro-prism array with a plurality of micro-prisms or a micro-mirror array with a plurality of micro-mirrors is arranged in place of a micro-lens array of an exposure apparatus such that a light incidence portion is formed in a wide manner and a light exit portion is formed in a narrow manner, and light being transmitted is focused to increase the quantity of light.
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