| 摘要 |
<P>PROBLEM TO BE SOLVED: To guide a cable or the like to follow a moving body with reduced vibration and little dust. <P>SOLUTION: A cable 56 is connected at one end to an X coarse movement stage 23X that moves in an X-axis direction along a horizontal plane, and is connected at the other end to a fixed member 66 disposed outside the movement range of the X coarse movement stage 23X. The cable 56 is fixed to a link mechanism 60 along the link mechanism 60 including four links 68, 70, 72 and 74 connected in series. When the X coarse movement stage 23X moves, the cable 56 is guided in a Z axis direction associating with deformation of the link mechanism 60, and thereby, a release amount of the cable 56 viewed from the fixed member 66 side is adjusted, suppressing sliding of the cable 56 on another member and simultaneously suppressing generation of vibration. <P>COPYRIGHT: (C)2011,JPO&INPIT |
