发明名称 METHOD FOR ENHANCING RELIABILITY OF P-CHANNEL SEMICONDUCTOR DEVICE AND P-CHANNEL SEMICONDUCTOR DEVICE MADE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a P-channel semiconductor device having an enhanced NBTI (negative bias temperature instability). SOLUTION: The semiconductor includes a control electrode containing at least a gate dielectric layer SiO on a semiconductor P-channel layer SiGe, wherein the gate dielectric layer SiO has a defect level E<SB>t</SB>, which decreases exponentially as function of energy, from the band edges of the adjacent layer (being the semiconductor P-channel layer SiGe, or optionally a capping layer Si) toward the center of the band gap of the layer. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011082527(A) 申请公布日期 2011.04.21
申请号 JP20100229445 申请日期 2010.10.12
申请人 IMEC;KU LEUVEN RESEARCH & DEVELOPMENT 发明人 KACZER BEN;FRANCO JACOPO
分类号 H01L29/78 主分类号 H01L29/78
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