| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for testing the degree of the corrosion of a metal material like metal wiring caused by a solution like a washing solution or the like containing a corrosive substance when washing of resist. SOLUTION: AC voltage of low frequency of 1 mHz-10 Hz is applied to the electrode cell immersed in a standard solution and the time integrated value of the standard impedance of the electrode cell in the standard solution is measured. Subsequently, the AC voltage of low frequency of 1 mHz-10 Hz is applied to the electrode cell immersed in a sample solution and the time integrated value of the sample impedance of the electrode cell in the sample solution is measured. Next, the elution degree of the electrode material of the electrode cell by the sample solution is led out from the difference between the time integrated value of the standard impedance and the time integrated value of the sample impedance. COPYRIGHT: (C)2011,JPO&INPIT |
