发明名称 |
PIEZOELECTRIC RESONATOR ELEMENT, PIEZOELECTRIC RESONATOR, AND ACCELERATION SENSOR |
摘要 |
A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions. |
申请公布号 |
US2011089788(A1) |
申请公布日期 |
2011.04.21 |
申请号 |
US20100950129 |
申请日期 |
2010.11.19 |
申请人 |
EPSON TOYOCOM CORPORATION |
发明人 |
KIKUSHIMA MASAYUKI |
分类号 |
H01L41/04 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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