| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ozone gas treatment method which can ensure the deposition of a plating metal in electroless-plating treatment, and further can impart stable adhesion strength to the deposited and plated film by treating the surface of a resin substrate with ozone gas on the optimum condition. <P>SOLUTION: This ozone gas treatment method is a method for treating the surface of the resin substrate with ozone gas by bringing the surface into contact with ozone gas, and includes: a condition-setting step of setting the conditions of a concentration D of the ozone gas, a treatment period of time t and a temperature T of the ozone gas, while using an amount I of the exposure to the ozone gas as an index, which is obtained by the following expression I=D×t×exp(-L/(273.15+T)), (wherein D is the concentration (g/Nm<SP>3</SP>) of the ozone gas; t is the treatment period of time (minute); T is the temperature (°C) of the ozone gas; and L is a temperature coefficient); an exposing step of exposing the surface of the substrate to the ozone gas according to the set condition; and a step of subjecting the exposed surface of the substrate to alkaline treatment. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
