发明名称 ASSEMBLIES FOR ION AND ELECTRON SOURCES AND METHODS OF USE
摘要 Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly.
申请公布号 US2011089333(A1) 申请公布日期 2011.04.21
申请号 US20100902391 申请日期 2010.10.12
申请人 发明人 FERRARA KEITH;BARKUS DAVID;PATKIN ADAM;MANNINO ROSARIO;PENTEK DANIEL;DELORENZO FRANK;RASMUSSEN BARTON
分类号 H01J3/14 主分类号 H01J3/14
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