| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system for generating information on integrated circuit (IC) simulation on an influence of the decision of a design and production process. SOLUTION: One embodiment includes a method for preparing and using a data store of profile-based information composed of a measurement signal, structure profile data, a process control parameter, and an IC simulation attribute and its use method. Another embodiment includes a method and a system for generating a simulation data store which uses a signal apart from a test grid to model an influence of an IC design and/or production process. One application includes the preparation of a simulation data store which is generated by using a test grid to model a geometric shape of an IC mutual connection and its method of use. The mutual connection simulation data store is used to monitor an electric and thermal characteristic of an IC device in line in the generation. COPYRIGHT: (C)2011,JPO&INPIT |
