| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method for inertial drive actuator capable of performing high-accuracy position detection, regardless of the magnitude of an electrostatic capacitance, and to provide an inertial drive actuator device. SOLUTION: The calibration method for inertial drive actuator for detecting a position of a moving body by an electrostatic capacitance includes a driving step of driving the moving body; an output step of outputting a first signal for detecting the electrostatic capacitance of a part where a moving body side electrode provided on the moving body and a detection electrode provided facing the electrode of the moving body which face it; a receiving step of receiving a second signal obtained by passing the first signal output in the output step through the electrode of the moving body and the detection electrode; and a calculation step of calculating an optimum first signal, based on the received signal obtained in the receiving step. COPYRIGHT: (C)2011,JPO&INPIT |
