发明名称 SYSTEMS AND METHODS FOR FABRICATION OF SUPERCONDUCTING INTEGRATED CIRCUITS
摘要 Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.
申请公布号 US2011089405(A1) 申请公布日期 2011.04.21
申请号 US20100992049 申请日期 2010.02.25
申请人 D-WAVE SYSTEMS INC. 发明人 LADIZINSKY ERIC;ROSE GEORDIE;HILTON JEREMY P.;DANTSKER EUGENE;OH BYONG HYOP
分类号 H01L39/22;H01L39/24 主分类号 H01L39/22
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