发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a base layer that has a first conductivity type, a source layer that is formed on the base layer and has a second conductivity type, and an insulating film that is formed on the source layer. The semiconductor device further includes a plurality of gate structures that penetrate the base layer, and a plurality of conductive parts that penetrate the insulating film and the source layer and electrically connect the source layer and the base layer to each other. The gate structures are formed in a strip shape in plan view. Parts in which the conductive portion is connected to the base layer are formed in a stripe shape in plan view, and are formed between the gate structures. Further, a dimension of the part in which the source layer and the base layer are in contact with each other between the gate structure and the conductive portion is 0.36 μm or more.
申请公布号 US2011089487(A1) 申请公布日期 2011.04.21
申请号 US20100836922 申请日期 2010.07.15
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 NAKATA KAZUNARI;NARAZAKI ATSUSHI;HONDA SHIGETO;MOTONAMI KAORU
分类号 H01L29/78 主分类号 H01L29/78
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