发明名称 CAPACITOR ELECTRODE, CAPACITOR STRUCTURE AND METHOD OF MAKING THE SAME
摘要 A method of fabricating a capacitor electrode. A stack structure is formed on a substrate, and the stack structure includes a first conductive layer, a first sacrificial layer, and a second sacrificial layer. The stack structure includes a first sidewall and a second sidewall facing the first sidewall. A conductive sidewall is formed on the first sidewall and the second sidewall to electrically connect the first conductive layer to the second conductive layer. Finally, the first and the second sacrificial layers are removed.
申请公布号 US2011090617(A1) 申请公布日期 2011.04.21
申请号 US20100686399 申请日期 2010.01.13
申请人 发明人 HUANG SHIN-BIN;HUANG CHUNG-LIN
分类号 H01G4/005;H01G4/00 主分类号 H01G4/005
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