HIGH-PURITY FLUORINE GAS, THE PRODUCTION AND USE THEREOF, AND A METHOD FOR MONITORING IMPURITIES IN A FLUORINE GAS

摘要

An apparatus for producing a fluorine gas, comprising at least one fluorine generating cell, and at least one fluorine generating cell detector for detecting components of products obtained by the fluorine generating cell, wherein at least one of the fluorine generating cells is connected with the fluorine generating cell detector.