| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of accurately measuring a dielectric property of a sample surface. SOLUTION: The method for measuring the dielectric property of the sample surface includes arranging a gap between a detection electrode and the sample surface, filling the gap with a liquid dielectric body and measuring the dielectric property of the sample surface to which the dielectric liquid contacts. The device measures the dielectric property of the sample surface, wherein a holding member for holding the sample is provided with a contact support part for attaching to the surface of the non-measuring site of the sample and for holding the sample with a gap with the surface of the measuring site, and a liquid inlet is provided in the holding member for filling the liquid dielectric body into the gap between the surface of the measuring site of the sample and the electrode, and the holding member. COPYRIGHT: (C)2011,JPO&INPIT
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