METHOD FOR PRODUCING MICROPARTICLES

摘要

The present invention discloses silicon microcarriers suitable for fluorescent assays as a well as a method of producing such microcarriers. The method comprises the steps of providing a SOI wafer comprising a bottom layer of monocristalline silicone, an insulator layer and a bottom layer of monocristalline silicon, delineating microparticles, etching away the insulator layer and then depositing an oxide layer on the wafer still holding the microparticles before finally lifting-off the microparticles.