| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce shape defects at an end of a portion corresponding to the teeth pattern of an interdigital pixel electrode in a method for manufacturing a liquid crystal display device for forming an interdigital pixel electrode by use of maskless exposure. <P>SOLUTION: The method for manufacturing a liquid crystal display panel includes a step of exposing a photosensitive resist by an exposure apparatus having a spatial optical modulating element that generates an exposure pattern by numerical control using a drawing data. The step includes exposing the whole exposure object region by repeating a first operation of exposing a region that can be exposed at once, while moving the region in a first direction of the exposure object region, and a second operation of moving the region that can be exposed at once in a direction perpendicular to the first direction. The drawing data includes numerical data designating the position and an exposure amount of a region to be irradiated with light in the exposure object region. Either a standard exposure amount that is necessary and sufficient to expose the photosensitive resist or an exposure amount greater than the standard exposure amount is designated as the exposure amount in the drawing data. <P>COPYRIGHT: (C)2011,JPO&INPIT |
