| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a crucible for a molecular beam epitaxy (MBE) effusion cell which maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion phenomena, and short term shutter-related flux transients. <P>SOLUTION: In the crucible 40 generally comprising a base section 41 and a conical section 42 with a first or outer orifice 43 disposed at one end of the conical section 42 and open to the exterior of the crucible 40, the base section 41 and the conical section 42 forming a single, unitary piece, the base section 41 has a substantially cylindrical configuration with a side wall 44, a bottom 45 disposed at one end of the side wall 44, and a negative draft tapered wall or neck 46 disposed at the opposite end of the side wall 44. The conical section 42 is defined by the portion of the crucible extending from the second orifice 47 to the periphery of the first orifice 43, and the conical section 42 comprises a positive draft wall 48 and an annular lip 49. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
