发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
摘要 A semiconductor device has an active region formed on a semiconductor substrate, a trench-type element isolation region formed on the semiconductor substrate, and a diffusion region in which fluorine is diffused that surrounds the element isolation region and is formed on the semiconductor substrate so as not to contact the active region.
申请公布号 US2011089513(A1) 申请公布日期 2011.04.21
申请号 US20100883221 申请日期 2010.09.16
申请人 CANON KABUSHIKI KAISHA 发明人 ENDO NOBUYUKI
分类号 H01L31/02;H01L21/02 主分类号 H01L31/02
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