发明名称 WAFER CONTAINER WITH DOOR ACTUATED WAFER RESTRAINT
摘要 PROBLEM TO BE SOLVED: To alleviate shock that may cause wafer breakage. SOLUTION: A container 10 holding a wafer includes a casing having an upper face 14, a bottom face 16, a pair of opposing faces 18 and 20, a rear face 22, and an opening front section defined by a door frame. A door 28 sealingly engages the door frame so as to close the opening front section. The container includes wafer restraint means having fixed-type wafer restraint means and operable wafer restraint means. The operable wafer restraint means can detachably position the door 28 against the door frame. When the door 28 leaves from the door frame, the door is positioned so that wafers can be inserted or removed to or from the container 10. When the door 28 is engaged with the door frame, since the wafers are restraineded in the container, the door is positioned so as to cooperate with the fixed-type wafer restraint means. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011082553(A) 申请公布日期 2011.04.21
申请号 JP20100273607 申请日期 2010.12.08
申请人 ENTEGRIS INC 发明人 BURNS JOHN;FULLER MATTHEW A;KING JEFFERY J;FORBES MARTIN L;SMITH MARK V
分类号 H01L21/673;B65D51/26 主分类号 H01L21/673
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