| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray CT apparatus requiring no setting work for cutting a plane having solder balls and the like arranged thereon in inspecting an object such as a circuit board, for example, a BGA and a CSP, having a plurality of specific parts such as solder balls on the surface of or along the plane inside the object. SOLUTION: The apparatus is equipped with: a specific part image array plane calculation means for searching for images of a plurality of preset specific parts existing on the surface of or along the plane inside the object W based on three-dimensional image information of the object obtained by reversely projecting projection data obtained by CT photographing, and calculating the plane P through which the center of the image of each specific part passes; and a display means for preparing a cross-sectional image sliced from the plane P based on the three-dimensional image information and automatically displaying it in a display, thereby immediately displaying the cross-sectional image sliced from the plane having the solder balls and the like arranged thereon without requiring an operator to set a slicing position. COPYRIGHT: (C)2011,JPO&INPIT
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