| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device and method, capable of suppressing an effect of light generated by reflection of a light source, when inspecting a surface defect of a specimen by which light is regularly reflected. SOLUTION: The device includes: a first light source for generating first illumination light; a second light source for generating second illumination light; a half mirror for reflecting the first illumination light and the second illumination light so as to irradiate the specimen; an imaging unit for imaging a first image acquired by receiving first reflected light formed by reflecting the first illumination light by the specimen, and second image acquired by receiving second reflected light formed by reflecting the second illumination light by the specimen; an image separation unit for separating the first image and the second image; a pixel specification unit for specifying pixels having light intensity higher than a threshold, to the first image and the second image respectively; and a pixel supplement unit for supplementing a pixel specified in the first image with a corresponding pixel in the second image, and supplementing a pixel specified in the second image with a corresponding pixel in the first image. COPYRIGHT: (C)2011,JPO&INPIT |
