Inspection apparatus using a chip

摘要

An inspection apparatus using a chip includes a rotor that holds a chip; a measurement room in which the rotor is provided and a through hole is formed; a light source that emits light for measurement to the chip through the through hole; a light measurement unit that detects the light from the chip, a rotation drive mechanism that rotates the rotor; and a cover member capable of covering or uncovering an opening portion.