发明名称 PHOTORESIST COMPOSITION
摘要 PURPOSE: A photo-resist composition is provided to prevent the remaining rate and the resolution of photo-resist from being reduced by including a compound with a specific chemical structure. CONSTITUTION: A photo-resist composition includes alkaline soluble resin, a photosensitive agent, one or more selected from compounds represented by chemical formula 1 to chemical formula 3, and a solvent. The photosensitive agent includes quinonediazide group. The alkaline soluble resin is cresol novolak resin. The cresol novolak resin is obtained by condensing formaldehyde and the mixture of m-cresol and p-cresol.
申请公布号 KR20110041127(A) 申请公布日期 2011.04.21
申请号 KR20090098171 申请日期 2009.10.15
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 JIN, SUNG YEOL;KIM, YONG IL;KIM, SEOUNG HYEON;KIM, SANG TAE
分类号 G03F7/022 主分类号 G03F7/022
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