CATALYTIC CVD DEVICE, METHOD FOR FORMATION OF FILM, PROCESS FOR PRODUCTION OF SOLAR CELL, AND SUBSTRATE HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a catalytic CVD device, a method for formation of a film, a process for production of a solar cell, and a substrate holder.

SOLUTION: In the catalytic CVD device 100, the holder 300 has an antireflective structure for preventing the reflection of a radiant ray ejected from a catalyst wire 11 toward the side of a substrate 200.

COPYRIGHT: (C)2011,JPO&INPIT