摘要 |
PROBLEM TO BE SOLVED: To provide an analysis means surely reproducing a trouble in a semiconductor device with a functional trouble therein and analyzing which part of a circuit in the semiconductor device has a problem in early failure analysis. SOLUTION: By action of an analysis device body including a good semiconductor device 2, a defective semiconductor device 3, and a signal sharing/dividing part to which the good semiconductor device 2, the defective semiconductor device 3 and an actual substrate (board) 4 are connected with wiring 16 and which includes a clock control 6 and a comparative circuit 7, the actual substrate (board) 4 is actuated by the good semiconductor device 2 and the defective semiconductor device 3 is actuated in the same timing, and the failure analysis is carried out by detecting the difference of these behaviors. COPYRIGHT: (C)2011,JPO&INPIT
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